高纯石英加工提纯技术研究现状与展望

    Research status and prospect of high-purity quartz processing and purification technology

    • 摘要: 高纯石英是半导体、光伏、光纤通信、特种玻璃等新兴产业不可或缺且难以替代的关键基础材料,是一种战略性材料,其直接关系到半导体、光伏等战略高新技术产业的稳定可持续发展。由于高纯石英原料的稀缺及加工提纯技术的不足,且一直被美国垄断,严重制约了我国芯片、半导体、光伏等战略性产业发展,4N8级高纯石英砂的国产替代目前仍是典型的“卡脖子”难题。为推动高纯石英早日实现国产化替代奠定技术基础,破解高纯石英“卡脖子”难题,本文通过系统查阅国内外高纯石英加工提纯技术方面的研究文献,在概述高纯石英国内外资源分布、生产消费及供需现状、概念及质量标准的基础上,分析了其杂质元素赋存状态及存在形式,明晰了石英内部较难去除的包裹体杂质和晶格杂质的提纯难点,阐释了包裹体和晶格杂质所包含的各杂质元素对石英制品的危害,总结了国内外先进提纯技术研究现状并阐述了光电分选、重选、浮选、酸浸、超声波辅助、微波煅烧、氯化焙烧等先进加工提纯工艺的概念和作用机理,指出了目前存在原料识别、微观表征、加工提纯技术机理、高效清洁分离技术、先进生产装备、高精度检测方法等方面的不足,明确了未来的发展方向,并提出建议,为4N8级高纯石英的国产替代提供技术参考资料。

       

      Abstract: High-purity quartz is an essential and difficult-to-replace key basic material in semiconductor, photovoltaic, fiber optic communications, special glass, and other emerging industries. It is also a strategic material that is directly related to the semiconductor, photovoltaic, and other strategic high-tech industries’ stable and sustainable development. The domestic substitution of 4N8 high-purity quartz sand is still typical of the “neck” problem because of the limited supply of high-purity quartz raw materials, the lack of processing and purification technology, and the U.S. monopoly, which severely limits the development of China’s chips, semiconductors, photovoltaic, and other strategic industries. In order to encourage the early realization of high-purity quartz in order to establish the technological basis for local substitution and solve the high-purity quartz “neck” issue, the paper thoroughly examines the domestic and international high-purity quartz processing purification technology research literature. On the basis of the overview of high-purity quartz domestic and foreign resource distribution, production and consumption, supply and demand status, concepts and quality standards, this paper analyzes the state of impurity elements and the existence of the form of the state, clear inclusions within the quartz impurities and lattice impurities that is more difficult to remove the purification of the difficulties, explain the inclusions and lattice impurities contained in the impurities of the hazards of each impurity element on the quartz products, summarizes the domestic and foreign research status of advanced purification technologies. It also elaborates the concepts and mechanisms of advanced purification processes such as photoelectric sorting, re-election, flotation, acid leaching, ultrasonic assisted, microwave calcination, chlorine roasting, etc. It finally puts forward the current deficiencies in raw material identification, microscopic characterization, processing and purification technology mechanisms, efficient and clean separation technology, advanced production equipment, high-precision testing methods, etc., and clarifies the direction of the future development and recommendations, so as to provide technical reference materials for the domestic substitution of 4N8 grade high-purity quartz.

       

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