Abstract: To analyse the efficiency of high-tech industry in Shaanxi province, the input and output process of high-tech industry is divided into two phases, knowledge creation and knowledge application.The result shows that not only the efficiency of knowledge creation, but also the efficiency of knowledge application are lower than the average level.There are some main reasons leading to this result.First, the proportation of manufacture of aircrafts and spacecrafts is close to one third in Shaanxi province, and that the economic benefit can hardly reflect through the market because of the particularity of the strategic position of manufacture of aircrafts and spacecrafts industry.Second, the minimum efficient scale of Shaanxi province is bigger to other provinces, so that the enterprise scale is too small to attain optimality.Therefore, lack of relative input from R&D leads that lack of output and poor quality in knowledge creation phase, futhermore, it leads to low efficiency in knowledge application phase.Finally, there are some external sources causing low efficiency in two phases, such as low level of activity in technological trade market and poor industry collaboration, as well as the low level of marketization degree.